SKU: 81388065181

A User's Guide to Ellipsometry

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Description

A User's Guide to EllipsometryThis text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry -- particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.

Binding Type: Paperback
Publisher: Dover Publications
Published: 07/07/2006
ISBN: 9780486450285
Pages: 260
Weight: 0.66lbs
Size: 8.50h x 5.64w x 0.56d
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SKU: 81388065181

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Nice product, very simple in reality. All screws together. Shelves are probably 12inches high - higher than I wanted so I won't be using it after all - but that is my fault for not realizing how vertically spaced the shelves would be. The unit takes up a lot of vertical wall space. My only dislike (hence the -1 rating) is the large stamped letters on every wall mounting plate. The letters don't appear to mean anything, and are very large and upraised - to me they detract from the overall appearance of the unit. The letters are not possible to get rid of without a grinder or significant file-work and repainting everything (not worth the significant effort that would entail).
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